[ OMCL-AC240TM- series ]
(update: July 3, 2002)
Being tip-shape conscious is for your success.
 
Apex of the probe before and after scanning (SEM images mag. x 100k)
Tip radius 13nm (before scanning) / Tip radius 79nm (after scanning for 1hr in contact mode SCM)
In contact mode operation, tip-loading force is relatively large to cause the tip wear during the scanning. Pictures above are its example. Although scanning capacitance microscopy in contact mode operation has become popular as an electric measuremt technique for R&D of IC devices, SCM in AC mode operation is longed for to solve the tip-wear problem.
Till then, operators should care for the degradation of the tip-shape caused by wearing and is required exchanging the probe before heavy deformation as in the picture above right.
So, it is recommended to study the relation between tip-loading force and image quality as a rehearsal and to find the lightest tip-loading force acceptable for your study.
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