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Small quantily unit | Wafer unit |
|---|---|---|
| 24 chips/unit | 375 chips/wafer | |
| Standard Silicon probe | OMCL-AC160TS-C2 | OMCL-AC160TS-W2 |
Outstanding features of Tetra tip cantilever
- 1) Easy to access where you want to see:
- A Tetra tip is located on the very end of the cantilever. This allows you to set the tip over a point of interest on the sample, easily and precisely, if you use an AFM combined with an optical microscope. Click here for an example (image size 40k)!
Look again at the SEM image above! This explains the easiness in an AFM combined with an optical microscope.
- 2) High lateral resolution:
- A sharper tip is required for revealing a sample surface much more precisely. Tetrahedral shape is ideal for obtaining a point terminated tip. Actually, the radius of the curvature of the Tetra tip is very small and the average is less than 10nm even with the Aluminum reflex coating.
OMCL-AC160TS- series covers a wide range of applications, however, it is outstanding in the observation of crystal surfaces, thin film, IC devices and so on.
Click here to assure the effectiveness of the Tetra tip (image size 80k).
- 3) Observation of rugged samples:
- The Tetra tip is thin with the tip angle of 35 degrees (scroll up this page more to see the SEM pictures). So this tip enables you to observe a narrower part of the sample.
Furthermore, the Tetra tip is a tilted tip, so substantial tip angle decreases more when it is attached to a chip holder in your AFM with certain tilt angle (probably, 5 to 20 degrees).
The tetra tip is effective for observing a rugged samples.Check Scan line profile and enlarged view of the tip apex.
- Below are SEM images of a Tetra tip from the front and side, and the last is a magnified view from side (picture size: 900nm x 680nm).
- Tip shape : sharpened tetrahedral (tilted)
It shows good symmetry viewed from the front and is inclined viewed from the side.
Considering this geometric feature, choose the fast scan (X) direction.
- Tip height : 11 micrometers (7 to 15 micrometers)
- Tip radius : smaller than 10 nm (6.8 nm (typ.))
- Tip angle : less than 35 degrees ( *)
- Tip material : single crystal silicon (semiconductor, N type, 4 - 6 ohm.cm)
Cantilever and chip of OMCL-AC160TS series
Lever thickness of OMCL-AC160TS- is typically 4.6um.
Cut off shoulders lessens contact between the chip and the specimen when the tip has engaged to the sample (illustration right above).
[Reflex coating]
Thin aluminum film with the thickness of 100nm is coated on the cantilever for reflecting light from the deflection sensor in the AFM equipment. High reflex for high S/N sensing can be expected.
Stiffness [N/m] and resonant frequency [Hz] of each cantilevers are Calculated values.
Lever Tip thickness
(um)length
(um)width
(um)spring const.
(N/m)resonant freq.
(kHz)height
(um)radius
(nm)OMCL-AC160TS- 4.6 160 50 42
(12 - 103)300
(200 - 400)11
(7 - 15)< 10
Mechanical Q factors of OMCL-AC160TS of about 500, are measured in our experiments however the final properties deeply depend on the holding condition of the chips in your AFM.
(Q factor of OMCL-AC240TS- is from 100 to 200 in air.)
In vacuum, the Q factor increases up to 10 times.
Chips are separated from each other and are placed in the Gel-Pak.
Inspections are carried out when the chips are in the wafer stage; those which pass the strict quality test are placed on the gel sheet ready for supply.
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