Micro Cantilevers
Measurement example
Measurement example (1) 50nm difference on wafer
10×10µm 3D image
10×10µm cross-section analysis
Measurement example (2) wafer bump
10×10µm 3D image
10×10µm Surface roughness analysis
Measurement example (3) IC pattern hall
4×4µm 3D image
4×4µm cross-section analysis
Measurement example (4) Micro lens
12.5×12.5µm 3D image
12.5×12.5µm cross-section analysis
Measurement example (5) Foreign body on optical lens
5×5µm 3D image
5×5µm cross-section analysis
Measurement example (6) Toner
1×1µm 3D image
1×1µm cross-section analysis
Measurement example (7) Stainless plate
15×15µm 3D image
15×15µm cross-section analysis
Measurement example (8) Copper foil
30×30µm 3D image
30×30µm Surface roughness analysis
Measurement example (9) Polymer film
10×10µm 3D image
10×10µm Surface roughness analysis
2.5×2.5µm 3D image
2.5×2.5µm Phase image
Measurement example (10) Thin film boundary
5×5µm 3D image
5×5µm cross-section analysis
Measurement example (11) Lactie acid bacterium
30×30µm 3D image
